High coercivity SmFeSiC films fabricated by multilayer sputtering
نویسندگان
چکیده
SmFeSiC thin films have been obtained by sputtering SmFe/C(Si) multilayers with a Ta underlayer on Si substrates and subsequently annali The coercivity of the SmF films strongly depends on the sputtering and annea itions. The influence of the thickness of the Ta underlayer, the thickness ratio of SmFe to C(Si), the argon pressure and heat treatment Inplane Coercivities up to 7.2 kOe and squareness of 0.94 were obtained.
منابع مشابه
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تاریخ انتشار 2017